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14 May 2007 Software tools for studying optical coating manufacturability with modern monochromatic monitoring devices
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Abstract
The success of fabrication of optical coatings depends on a proper choice of a theoretical coating design and on the choice of monitoring strategy that provides low thickness errors for the chosen design. Software tools described in this presentation help an optical coating engineer to investigate a potential manufacturability of a given theoretical design when various monochromatic monitoring strategies are applied. This may help to reduce or even eliminate test deposition runs required for a successful coating fabrication.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alexander Tikhonravov, Michael Trubetskov, Jennifer Kruschwitz, Alfons Zoller, Harro Hagedorn, Boris Romanov, and Michael Boos "Software tools for studying optical coating manufacturability with modern monochromatic monitoring devices", Proc. SPIE 10316, Optifab 2007: Technical Digest, 103161K (14 May 2007); https://doi.org/10.1117/12.718119
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