Surface and thickness metrology using scanning low-coherence dual interferometry (SLCDI)

Christopher J. Ditchman; Christopher Cotton; Damon W. Diehl

doi:10.1117/12.718724

14 May 2007 Surface and thickness metrology using scanning low-coherence dual interferometry (SLCDI)

Christopher J. Ditchman, Christopher Cotton, Damon W. Diehl

Proceedings Volume 10316, Optifab 2007: Technical Digest; 103161Z (2007) https://doi.org/10.1117/12.718724
Event: Optifab 2007, 2007, Rochester, New York, United States

Abstract

We present experimental results for a low-coherence, dual-wavelength metrology system capable of measuring simultaneously both optical thickness and surface ﬁgure. The system measures optical thicknesses as thin as 12 microns to as wide as 12 mm with an accuracy of 0.1 microns. The current system scans at a resolution of 50 microns, which is limited by the spot-size of the measurement beam. We validate that SLCDI yields results in agreement with traditional interferometry and demonstrate its ability to measure aspheric “saddle” mirrors and complex three-dimensional surfaces.

Citation Download Citation

Christopher J. Ditchman, Christopher Cotton, and Damon W. Diehl "Surface and thickness metrology using scanning low-coherence dual interferometry (SLCDI)", Proc. SPIE 10316, Optifab 2007: Technical Digest, 103161Z (14 May 2007); https://doi.org/10.1117/12.718724

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