Fiber interferometer combining sub-nm displacement resolution with miniaturized sensor head

Lun-Kai Cheng; Ronald A. J. Hagen; Lodi N. Schriek; Peter M. Toet; Oana E. Van der Togt

doi:10.1117/12.2265441

23 April 2017 Fiber interferometer combining sub-nm displacement resolution with miniaturized sensor head

Lun-Kai Cheng, Ronald A. J. Hagen, Lodi N. Schriek, Peter M. Toet, Oana E. Van der Togt

Proceedings Volume 10323, 25th International Conference on Optical Fiber Sensors; 1032380 (2017) https://doi.org/10.1117/12.2265441
Event: 25th International Conference on Optical Fiber Sensors, 2017, Jeju, Korea, Republic of

Abstract

The presented interferometer concept enables high-accuracy target displacement measurement in difficult accessible locations and the development of small fiber optic sensor to measure other physical parameters e.g. pressure, vibration, gravity force, etc.. Furthermore, this configuration is basically insensitive to disturbances to the lead fiber between the passive sensor head and the measurement system including the electro-optical parts and the detection interferometer. Two test setups are built and tested to demonstrate the feasibility of high-speed measurement up to 50 kHz, low system drift of ~0.5 nm over 500 s and a low displacement noise level down to 2.8 pm/√ Hz.

Citation Download Citation

Lun-Kai Cheng, Ronald A. J. Hagen, Lodi N. Schriek, Peter M. Toet, and Oana E. Van der Togt "Fiber interferometer combining sub-nm displacement resolution with miniaturized sensor head", Proc. SPIE 10323, 25th International Conference on Optical Fiber Sensors, 1032380 (23 April 2017); https://doi.org/10.1117/12.2265441

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