Optical thin film inspection using parallel spectral domain optical coherence tomography

Muhammad Faizan Shirazi; Ruchire Eranga Wijesinghe; Naresh Kumar Ravichandran; Pilun Kim; Mansik Jeon; Jeehyun Kim

doi:10.1117/12.2267395

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23 April 2017 Optical thin film inspection using parallel spectral domain optical coherence tomography

Muhammad Faizan Shirazi, Ruchire Eranga Wijesinghe, Naresh Kumar Ravichandran, Pilun Kim, Mansik Jeon, Jeehyun Kim

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Proceedings Volume 10323, 25th International Conference on Optical Fiber Sensors; 103238V (2017) https://doi.org/10.1117/12.2267395
Event: 25th International Conference on Optical Fiber Sensors, 2017, Jeju, Korea, Republic of

Abstract

The conventional Fourier domain optical coherence tomography system requires single scanner for two dimensional cross-sectional image and two scanners for volumetric image. Parallel spectral domain optical coherence tomography has advantage of single scanner for volumetric image, while two dimensional cross-sectional images are obtained by parallel acquisition of illuminated line on sample using area camera. In this study, the industrial inspection of optical thin film on touch screen panels was demonstrated using parallel spectral domain optical coherence tomography. The cross-sectional and volumetric images were acquired to detect the internal sub layer defects in optical thin film which are difficult to observe using visual or machine vision based inspection methods. The results indicate the possible application of the proposed system in touch screen panels inspection for quality assurance of product at consumer end.

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Muhammad Faizan Shirazi, Ruchire Eranga Wijesinghe, Naresh Kumar Ravichandran, Pilun Kim, Mansik Jeon, and Jeehyun Kim "Optical thin film inspection using parallel spectral domain optical coherence tomography", Proc. SPIE 10323, 25th International Conference on Optical Fiber Sensors, 103238V (23 April 2017); https://doi.org/10.1117/12.2267395

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