Evaluation and tolerancing of irregularly shaped interferometric test regions

Christian Beder; Martin Peschka

doi:10.1117/12.2270222

26 June 2017 Evaluation and tolerancing of irregularly shaped interferometric test regions

Christian Beder, Martin Peschka

Proceedings Volume 10329, Optical Measurement Systems for Industrial Inspection X; 103292G (2017) https://doi.org/10.1117/12.2270222
Event: SPIE Optical Metrology, 2017, Munich, Germany

Abstract

The evaluation of non-circular test regions poses an unusual but tricky problem to interferometric testing since typical polynomial decompositions of the measured wavefront like Zernikes are only valid in a circular region. Despite the fact that of course non-circular polynomial decompositions exist they still rely on regular regions like ellipses or rectangles. For irregular shapes of test regions no widely accepted general decomposition exists.
Unfortunately it is necessary in some cases to test completely irregularly shaped test regions. May it because the optics simply is of this shape and needs to be tested in this state or because the used area is irregular and it is undesired to extend the test region to a larger, but regular shape.
We present a simple method that not only provides a possibility to evaluate any arbitrary shaped test region but also to have a tolerance model that gives reasonable and uses worldwide accepted specification standards.
Certain interferometer software may be suited for an appropriate data analysis. An overview over some commercially available interferometer software is given with respect to the requirement of the presented method.

Citation Download Citation

Christian Beder and Martin Peschka "Evaluation and tolerancing of irregularly shaped interferometric test regions", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 103292G (26 June 2017); https://doi.org/10.1117/12.2270222

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