The research of structured reflective surface of matrix sensor according to generalized scheme of ellipsometry

Anastasiya Y. Lobanova; Anastasia A. Blokhina; Victoria A. Ryzhova; Valery V. Korotaev; Victor M. Denisov

doi:10.1117/12.2270308

26 June 2017 The research of structured reflective surface of matrix sensor according to generalized scheme of ellipsometry

Anastasiya Y. Lobanova, Anastasia A. Blokhina, Victoria A. Ryzhova, Valery V. Korotaev, Victor M. Denisov

Author Affiliations +

Proceedings Volume 10329, Optical Measurement Systems for Industrial Inspection X; 103292K (2017) https://doi.org/10.1117/12.2270308
Event: SPIE Optical Metrology, 2017, Munich, Germany

Abstract

The work is devoted to ellipsometric investigation of the structured reflecting surface of a matrix sensor. By the generalized scheme of ellipsometry, the optical and geometric parameters of the layers of the matrix receiver can be determined. These parameters include the thickness and refractive index. Ellipsometric angles were determined using the ellipsometer. They are used as input data in the inverse ellipsometry problem. After determining the thickness and refractive indices of the sensor layers, it is possible to calculate its transmittance.When this indicator is known ,the sensitivity of the receiver can be calculated at the certain point. In this work the algorithm of the calculation of the sensitivity of a matrix receiver of optical radiation is described ,the input data in this algorithm are considered to be the ellipsometric angles.

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Anastasiya Y. Lobanova, Anastasia A. Blokhina, Victoria A. Ryzhova, Valery V. Korotaev, and Victor M. Denisov "The research of structured reflective surface of matrix sensor according to generalized scheme of ellipsometry", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 103292K (26 June 2017); https://doi.org/10.1117/12.2270308

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