In-line height profiling metrology sensor for zero defect production control

Rob Snel; Jasper Winters; Thomas Liebig; Wouter Jonker

doi:10.1117/12.2270711

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26 June 2017 In-line height profiling metrology sensor for zero defect production control

Rob Snel, Jasper Winters, Thomas Liebig, Wouter Jonker

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Proceedings Volume 10329, Optical Measurement Systems for Industrial Inspection X; 1032933 (2017) https://doi.org/10.1117/12.2270711
Event: SPIE Optical Metrology, 2017, Munich, Germany

Abstract

Contemporary production systems of mechanical precision parts show challenges as increased complexity, tolerances shrinking to sub-microns and yield losses that must be mastered to the extreme. More advanced automation and process control is required to accomplish this task. Often a solution based on feedforward/feedback control is chosen requiring innovative and more advanced in line metrology. This article concentrates first on the context of in line metrology for process control and then on the development of a specific in line height profiling sensor. The novel sensor technology is based on full field time domain white light interferometry which is well know from the quality lab. The novel metrology system is to be mounted close to the production equipment, as required to minimize time delay in the control loop, and is thereby fully exposed to vibrations. This sensor is innovated to perform in line with an orders of magnitude faster throughput than laboratory instruments; it’s robust to withstand the rigors of workshops and has a height resolution that is in the nanometer range.

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Rob Snel, Jasper Winters, Thomas Liebig, and Wouter Jonker "In-line height profiling metrology sensor for zero defect production control", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 1032933 (26 June 2017); https://doi.org/10.1117/12.2270711

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