Investigation of accuracy characteristics of circular photodetector: Multiscan

Kirill S. Povarov; Sergey S. Mitrofanov

doi:10.1117/12.2270030

26 June 2017 Investigation of accuracy characteristics of circular photodetector: Multiscan

Proceedings Volume 10329, Optical Measurement Systems for Industrial Inspection X; 103293L (2017) https://doi.org/10.1117/12.2270030
Event: SPIE Optical Metrology, 2017, Munich, Germany

Abstract

This article is about the research of precision characteristics of a circular sensor "Multiscan". The research was conducted on installation which base was a goniometer GS-5. Such characteristics as nonlinearity, stability, error of reproducibility of results of measurements were investigated. A scheme for arranging the encoder on the basis of a circular photodetector "Multiscan" is proposed.

Citation Download Citation

Kirill S. Povarov and Sergey S. Mitrofanov "Investigation of accuracy characteristics of circular photodetector: Multiscan", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 103293L (26 June 2017); https://doi.org/10.1117/12.2270030

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