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26 June 2017Heterodyne grating interferometry based on sinusoidal phase modulation for displacement measurement
In this study, a heterodyne grating interferometer based on the sinusoidal phase modulation method for displacement
measurements was proposed. The interference beams were modulated using a sinusoidal oscillating grating, and the
proposed frequency-domain quadrature detection method was used to detect the optical phase of the interferometer
and determine the displacement. Experimental results were consistent with the strain gauge results for several
displacement ranges. When only high-frequency noise was considered, our method achieved a measurement
resolution of approximately 2 nm.
Ju-Yi Lee,Hung-Lin Hsieh, andZhi Ying Lin
"Heterodyne grating interferometry based on sinusoidal phase modulation for displacement measurement", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 103293S (26 June 2017); https://doi.org/10.1117/12.2270100
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Ju-Yi Lee, Hung-Lin Hsieh, Zhi Ying Lin, "Heterodyne grating interferometry based on sinusoidal phase modulation for displacement measurement," Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 103293S (26 June 2017); https://doi.org/10.1117/12.2270100