Broadband interferometric characterisation of nano-positioning stages with sub-10 pm resolution

Zhi Li; Uwe Brand; Helmut Wolff; Ludger Koenders; Andrew Yacoot; Prabowo Puranto

doi:10.1117/12.2270262

26 June 2017 Broadband interferometric characterisation of nano-positioning stages with sub-10 pm resolution

Zhi Li, Uwe Brand, Helmut Wolff, Ludger Koenders, Andrew Yacoot, Prabowo Puranto

Proceedings Volume 10329, Optical Measurement Systems for Industrial Inspection X; 1032944 (2017) https://doi.org/10.1117/12.2270262
Event: SPIE Optical Metrology, 2017, Munich, Germany

Abstract

A traceable calibration setup for investigation of the quasi-static and the dynamic performance of nano-positioning stages is detailed, which utilizes a differential plane-mirror interferometer with double-pass configuration from the National Physical Laboratory (NPL). An NPL-developed FPGA-based interferometric data acquisition and decoding system has been used to enable traceable quasi-static calibration of nano-positioning stages with high resolution. A lockin based modulation technique is further introduced to quantitatively calibrate the dynamic response of moving stages with a bandwidth up to 100 kHz and picometer resolution. First experimental results have proven that the calibration setup can achieve under nearly open-air conditions a noise floor lower than 10 pm/sqrt(Hz). A pico-positioning stage, that is used for nanoindentation with indentation depths down to a few picometers, has been characterized with this calibration setup.

Citation Download Citation

Zhi Li, Uwe Brand, Helmut Wolff, Ludger Koenders, Andrew Yacoot, and Prabowo Puranto "Broadband interferometric characterisation of nano-positioning stages with sub-10 pm resolution", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 1032944 (26 June 2017); https://doi.org/10.1117/12.2270262

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