MoS2 thin films prepared by sulfurization

M. Sojková; Š. Chromik; A. Rosová; E. Dobročka; P. Hutár; D. Machajdík; A. P. Kobzev; M. Hulman

doi:10.1117/12.2273846

31 August 2017 MoS₂ thin films prepared by sulfurization

M. Sojková, Š. Chromik, A. Rosová, E. Dobročka, P. Hutár, D. Machajdík, A. P. Kobzev, M. Hulman

Proceedings Volume 10354, Nanoengineering: Fabrication, Properties, Optics, and Devices XIV; 103541K (2017) https://doi.org/10.1117/12.2273846
Event: SPIE Nanoscience + Engineering, 2017, San Diego, California, United States

Abstract

Sulfurization of a Mo layer is one of the most used methods for preparation of thin Mo_S2 films. In the method, a sulfur powder and Mo covered substrate are placed in different positions within a furnace, and heated separately. This requires a furnace having at least two zones. Here, we present a simplified version of the method where a one-zone tube furnace was used. A molybdenum film on a substrate and a sulfur powder were placed in the center of the furnace and heated at temperatures above 800°C. Mo films transform into Mo_S2 in vapors of sulphur at high temperatures. As-prepared films were characterized by number of techniques including X-ray diffraction (XRD), atomic force microscopy (AFM), transmission electron microscopy (TEM), Raman, Rutherford backscattering (RBS) and X-ray photoelectron spectroscopy (XPS). It appears that one-zone sulfurization, with just one annealing temperature used, is a suitable method for fabrication of Mo_S2 thin films. This method is fast, cheap and easy to scale up.

Citation Download Citation

M. Sojková, Š. Chromik, A. Rosová, E. Dobročka, P. Hutár, D. Machajdík, A. P. Kobzev, and M. Hulman "MoS₂ thin films prepared by sulfurization", Proc. SPIE 10354, Nanoengineering: Fabrication, Properties, Optics, and Devices XIV, 103541K (31 August 2017); https://doi.org/10.1117/12.2273846

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