A new optics metrology laboratory at CNPEM: metrology capabilities, performance, and future plans

Bernd C. Meyer; Murilo B. da Silva

doi:10.1117/12.2274020

7 September 2017 A new optics metrology laboratory at CNPEM: metrology capabilities, performance, and future plans

Bernd C. Meyer, Murilo B. da Silva

Proceedings Volume 10385, Advances in Metrology for X-Ray and EUV Optics VII; 103850C (2017) https://doi.org/10.1117/12.2274020
Event: SPIE Optical Engineering + Applications, 2017, San Diego, California, United States

Abstract

A new metrology and assembly facility was constructed at CNPEM and turned recently into operation. The facility includes an assembly area of 100 m², a high-precision mechanical metrology laboratory and an optical metrology laboratory (OML), both of 50 m², and provide improved environmental and instrumental conditions. All three laboratories sit on inertial blocks with special foundations originally developed and tested as prototype for the SIRIUS tunnel floor. The inertial blocks perform very well in attenuation of external vibrations. The OML is cleanroom ISO7 and has temperature stability better than ±0.1 K. Measurements of the surface under test (SUT) using NOM, Fizeau- Interferometer (FI), Micro-Interferometer (MI) and AFM as the four instruments inside the OML cover the full required range of spatial frequencies. We report on the performance of the NOM and FI, the first instruments installed in the OML.

Conference Presentation

Citation Download Citation

Bernd C. Meyer and Murilo B. da Silva "A new optics metrology laboratory at CNPEM: metrology capabilities, performance, and future plans", Proc. SPIE 10385, Advances in Metrology for X-Ray and EUV Optics VII, 103850C (7 September 2017); https://doi.org/10.1117/12.2274020

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