Paper
7 August 2017 Different grades MEMS accelerometers error characteristics
M. Pachwicewicz, J. Weremczuk
Author Affiliations +
Proceedings Volume 10445, Photonics Applications in Astronomy, Communications, Industry, and High Energy Physics Experiments 2017; 1044563 (2017) https://doi.org/10.1117/12.2280927
Event: Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2017, 2017, Wilga, Poland
Abstract
The paper presents calibration effects of two different MEMS accelerometers of different price and quality grades and discusses different accelerometers errors types. The calibration for error determining is provided by reference centrifugal measurements. The design and measurement errors of the centrifuge are discussed as well. It is shown that error characteristics of the sensors are very different and it is not possible to use simple calibration methods presented in the literature in both cases.
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. Pachwicewicz and J. Weremczuk "Different grades MEMS accelerometers error characteristics", Proc. SPIE 10445, Photonics Applications in Astronomy, Communications, Industry, and High Energy Physics Experiments 2017, 1044563 (7 August 2017); https://doi.org/10.1117/12.2280927
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CITATIONS
Cited by 3 scholarly publications.
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KEYWORDS
Sensors

Calibration

Microelectromechanical systems

Error analysis

Manufacturing

Temperature metrology

Computer programming

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