The role of model-based MPC in advanced mask manufacturing

Ingo Bork; Peter Buck

doi:10.1117/12.2281894

28 September 2017 The role of model-based MPC in advanced mask manufacturing

Ingo Bork, Peter Buck

Proceedings Volume 10446, 33rd European Mask and Lithography Conference; 104460B (2017) https://doi.org/10.1117/12.2281894
Event: 33rd European Mask and Lithography Conference, 2017, Dresden, Germany

Abstract

This paper describes the use of model-based MPC in mask manufacturing for the 14 nm technology node and beyond, analyzes the requirements and challenges for introducing MPC and highlights its benefits in the mask manufacturing process.

Citation Download Citation

Ingo Bork and Peter Buck "The role of model-based MPC in advanced mask manufacturing", Proc. SPIE 10446, 33rd European Mask and Lithography Conference, 104460B (28 September 2017); https://doi.org/10.1117/12.2281894

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