Methods for improving the damage performance of fused silica polished by magnetorheological finishing

K. R. P. Kafka; B. Hoffman; S. Papernov; M. A. DeMarco; C. Hall; K. L. Marshall; S. G. Demos

doi:10.1117/12.2281479

11 December 2017 Methods for improving the damage performance of fused silica polished by magnetorheological finishing

K. R. P. Kafka, B. Hoffman, S. Papernov, M. A. DeMarco, C. Hall, K. L. Marshall, S. G. Demos

Author Affiliations +

Proceedings Volume 10447, Laser-Induced Damage in Optical Materials 2017; 1044709 (2017) https://doi.org/10.1117/12.2281479
Event: SPIE Laser Damage, 2017, Boulder, Colorado, United States

Abstract

The laser-induced damage threshold of fused-silica samples processed via magnetorheological finishing is investigated for polishing compounds depending on the type of abrasive material and the post-polishing surface roughness. The effectiveness of laser conditioning is examined using a ramped pre-exposure with the same 351-nm, 3-ns Gaussian pulses. Finally, we examine chemical etching of the surface and correlate the resulting damage threshold to the etching protocol. A combination of etching and laser conditioning is found to improve the damage threshold by a factor of ~3, while maintaining <1-nm surface roughness.

Citation Download Citation

K. R. P. Kafka, B. Hoffman, S. Papernov, M. A. DeMarco, C. Hall, K. L. Marshall, and S. G. Demos "Methods for improving the damage performance of fused silica polished by magnetorheological finishing", Proc. SPIE 10447, Laser-Induced Damage in Optical Materials 2017, 1044709 (11 December 2017); https://doi.org/10.1117/12.2281479

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