Fabrication and correction of freeform surface based on Zernike polynomials by slow tool servo

Yuan-Chieh Cheng; Ming-Ying Hsu; Wei-Jei Peng; Wei-Yao Hsu

doi:10.1117/12.2279270

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16 October 2017 Fabrication and correction of freeform surface based on Zernike polynomials by slow tool servo

Yuan-Chieh Cheng, Ming-Ying Hsu, Wei-Jei Peng , Wei-Yao Hsu

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Proceedings Volume 10448, Optifab 2017; 1044813 (2017) https://doi.org/10.1117/12.2279270
Event: SPIE Optifab, 2017, Rochester, New York, United States

Abstract

Recently, freeform surface widely using to the optical system; because it is have advance of optical image and freedom available to improve the optical performance. For freeform optical fabrication by integrating freeform optical design, precision freeform manufacture, metrology freeform optics and freeform compensate method, to modify the form deviation of surface, due to production process of freeform lens ,compared and provides more flexibilities and better performance. This paper focuses on the fabrication and correction of the free-form surface. In this study, optical freeform surface using multi-axis ultra-precision manufacturing could be upgrading the quality of freeform. It is a machine equipped with a positioning C-axis and has the CXZ machining function which is also called slow tool servo (STS) function. The freeform compensate method of Zernike polynomials results successfully verified; it is correction the form deviation of freeform surface. Finally, the freeform surface are measured experimentally by Ultrahigh Accurate 3D Profilometer (UA3P), compensate the freeform form error with Zernike polynomial fitting to improve the form accuracy of freeform.

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Yuan-Chieh Cheng, Ming-Ying Hsu, Wei-Jei Peng , and Wei-Yao Hsu "Fabrication and correction of freeform surface based on Zernike polynomials by slow tool servo", Proc. SPIE 10448, Optifab 2017, 1044813 (16 October 2017); https://doi.org/10.1117/12.2279270

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