Paper
13 June 2017 Three-dimensional shape measurement with modal phase measuring deflectometry
Lei Huang, Junpeng Xue, Bo Gao, Mourad Idir
Author Affiliations +
Proceedings Volume 10449, Fifth International Conference on Optical and Photonics Engineering; 1044909 (2017) https://doi.org/10.1117/12.2269017
Event: Fifth International Conference on Optical and Photonics Engineering, 2017, Singapore, Singapore
Abstract
Phase Measuring Deflectometry (PMD) is a powerful tool to measure the three-dimensional shape for freeform specular surfaces. In this work, a model based method is applied to PMD, called as Modal Phase Measuring Deflectometry (MPMD). The surface height and slopes are represented in mathematical models and updated by optimizing the model coefficients, in order to minimize the discrepancy between the reprojection in ray tracing and the actual measurement. The pose of the screen relative to the camera is pre-calibrated and then optimized together with the surface shape coefficients. Moreover, the correspondence residuals because of the discrepancies between the modal estimation and practical acquisition are analyzed. Slope residuals are calculated from these discrepancies. Zonal integration methods which are good at dealing with local variations are used to reconstruct the height residual for compensation. Simulations and experiments are conducted to demonstrate the feasibility of the proposed approach.
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Lei Huang, Junpeng Xue, Bo Gao, and Mourad Idir "Three-dimensional shape measurement with modal phase measuring deflectometry", Proc. SPIE 10449, Fifth International Conference on Optical and Photonics Engineering, 1044909 (13 June 2017); https://doi.org/10.1117/12.2269017
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CITATIONS
Cited by 2 scholarly publications and 2 patents.
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KEYWORDS
Deflectometry

3D metrology

Mathematical modeling

Phase measurement

3D modeling

Optical metrology

Ray tracing

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