Research and design on orthogonal diffraction grating-based 3D nanometer displacement sensor

Baoshuai Liu; Yibao Yuan; Zhehao Yin

doi:10.1117/12.2285042

24 October 2017 Research and design on orthogonal diffraction grating-based 3D nanometer displacement sensor

Baoshuai Liu, Yibao Yuan, Zhehao Yin

Proceedings Volume 10458, AOPC 2017: 3D Measurement Technology for Intelligent Manufacturing; 1045818 (2017) https://doi.org/10.1117/12.2285042
Event: Applied Optics and Photonics China (AOPC2017), 2017, Beijing, China

Abstract

This study concerns an orthogonal diffraction grating-based nanometer displacement sensor. In this study, we performed calculation of displacements in the XYZ directions. In the optical measured path part, we used a two-dimensional orthogonal motion grating and a two-dimensional orthogonal reference grating with the pitch of 0.5um to measure the displacement of XYZ in three directions by detecting ±1st diffraction fringes. The self-collimated structure of the grating greatly extended the Z-axis range. We also simulated the optical path of the sensor with ZEMAX software and verified the feasibility of the scheme. For signal subdivision and processing, we combined large number counting (completed grating line) with small number counting (digital subdivision), realizing high multiples of subdivision of grating interference signals. We used PC to process the interference fringes and greatly improved the processing speed. In the scheme, the theoretical multiples of subdivision could reach 1024 with 10-bit AD conversion, but the actual multiples of subdivision was limited by the quality of the grating interference signals. So we introduced an orthogonal compensation circuit and a filter circuit to improve the signal quality.

Citation Download Citation

Baoshuai Liu, Yibao Yuan, and Zhehao Yin "Research and design on orthogonal diffraction grating-based 3D nanometer displacement sensor", Proc. SPIE 10458, AOPC 2017: 3D Measurement Technology for Intelligent Manufacturing, 1045818 (24 October 2017); https://doi.org/10.1117/12.2285042

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