Tuneable UV solid-state laser lines for surface processing

Mikhail Ivanenko; Vyacheslav Grimm; Fabian Gaussmann; Henning Kalis; Markus Wiesner

doi:10.1117/12.2287382

15 February 2018 Tuneable UV solid-state laser lines for surface processing

Mikhail Ivanenko, Vyacheslav Grimm, Fabian Gaussmann, Henning Kalis, Markus Wiesner

Proceedings Volume 10525, High-Power Laser Materials Processing: Applications, Diagnostics, and Systems VII; 1052505 (2018) https://doi.org/10.1117/12.2287382
Event: SPIE LASE, 2018, San Francisco, California, United States

Abstract

Long UV laser lines find application in crystallization of Si, lift-off of flexible OLED displays from assistance glass and other surface processing technologies. With the appearance of powerful and reliable pulsed UV DPSS lasers in the last years, many efforts are directed to the implementation of such lasers in the line systems instead of excimer lasers. For the processing with a high energy density, several DPSS lasers have usually to be coupled in a homogeneous line focus with 100 - 1000 mm length and FWHM of 20 – 40 μm. We describe an advantageous line design approach based on anisotropic laser beam transformation, which improves beam quality for the narrow line axis and allows tight focusing with large depth of the focus. Solutions for tuning the line width are discussed.

Conference Presentation

Citation Download Citation

Mikhail Ivanenko, Vyacheslav Grimm, Fabian Gaussmann, Henning Kalis, and Markus Wiesner "Tuneable UV solid-state laser lines for surface processing", Proc. SPIE 10525, High-Power Laser Materials Processing: Applications, Diagnostics, and Systems VII, 1052505 (15 February 2018); https://doi.org/10.1117/12.2287382

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available