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23 February 2018 Metalized monolithic high-contrast grating as a mirror for GaN-based VCSELs
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In this paper, we present a novel design of a nitride-based VCSEL emitting at 414 nm and perform numerical analysis of optical, electrical and thermal phenomena. The bottom mirror of the laser is a Al(In)N/GaN DBR (Distributed Bragg Reflector), whereas the top mirror is realized as a semiconductor-metal subwavelength-grating, etched in GaN with silver stripes deposited between the stripes of the semiconductor grating. In this monolithic structure simulations show a uniform active-region current density on the level of 5.5 kA/cm2 for the apertures as large as 10 μm. In the case of a broader apertures, e.g. 40 μm, we showed that, assuming a homogeneous current injection at the level of 5.5 kA/cm2 , the temperature inside the laser should not exceed 360 K, which gives promise to improve thermal management by uniformisation of the current injection.
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Robert P. Sarzała, Adam K. Sokół, Łukasz Piskorski, Maciej Kuc, Patrycja Śpiewak, Magdalena Maciniak, Marcin Gębski, Michał Wasiak, and Tomasz Czyszanowski "Metalized monolithic high-contrast grating as a mirror for GaN-based VCSELs", Proc. SPIE 10532, Gallium Nitride Materials and Devices XIII, 105321B (23 February 2018);

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