Paper
23 February 2018 Goos-Hänchen effect on Si thin films with spherical and cylindrical pores
Cherrie May Olaya, Wilson O. Garcia, Nathaniel Hermosa
Author Affiliations +
Proceedings Volume 10533, Oxide-based Materials and Devices IX; 105332O (2018) https://doi.org/10.1117/12.2291484
Event: SPIE OPTO, 2018, San Francisco, California, United States
Abstract
We examine the effects on the spatial and angular Goos-Hanchen (GH) beam shifts of spherical and cylindrical pores in a thin film. In our calculations, a p-polarized light is incident on a 1-μm thick porous silicon (Si) thin film on a Si substrate. The beam shifts are within the measurement range of usual optical detectors. Our results show that a technique based on GH shift can be used to determine the porosity and pore structure of thin films at a given thickness.
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Cherrie May Olaya, Wilson O. Garcia, and Nathaniel Hermosa "Goos-Hänchen effect on Si thin films with spherical and cylindrical pores", Proc. SPIE 10533, Oxide-based Materials and Devices IX, 105332O (23 February 2018); https://doi.org/10.1117/12.2291484
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KEYWORDS
Silicon

Thin films

Silicon films

Refraction

Reflection

Reflectivity

Sensors

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