Silicon nitride photonics: from visible to mid-infrared wavelengths

Gloria Micó; Luis A. Bru; Daniel Pastor; David Doménech; Juan Fernández; Ana Sánchez; Josep M. Cirera; Carlos Domínguez; Pascual Muñoz

doi:10.1117/12.2287421

22 February 2018 Silicon nitride photonics: from visible to mid-infrared wavelengths

Gloria Micó, Luis A. Bru, Daniel Pastor, David Doménech, Juan Fernández, Ana Sánchez, Josep M. Cirera, Carlos Domínguez, Pascual Muñoz

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Proceedings Volume 10537, Silicon Photonics XIII; 105370B (2018) https://doi.org/10.1117/12.2287421
Event: SPIE OPTO, 2018, San Francisco, California, United States

Abstract

Silicon nitride has received a lot of attention during the last ten years, for applications such as bio-photonics, tele/datacom, optical signal processing and sensing. In this paper, firstly an updated review of the state of the art of silicon nitride photonics integration platforms will be provided. Secondly, our developments on a moderate confinement Si₃N₄ platform in the near-infrared will be presented. Finally, our steps towards establishing a Si₃N₄ based platform for broadband operation spanning from visible to mid-infrared wavelengths will be introduced.

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Gloria Micó, Luis A. Bru, Daniel Pastor, David Doménech, Juan Fernández, Ana Sánchez, Josep M. Cirera, Carlos Domínguez, and Pascual Muñoz "Silicon nitride photonics: from visible to mid-infrared wavelengths", Proc. SPIE 10537, Silicon Photonics XIII, 105370B (22 February 2018); https://doi.org/10.1117/12.2287421

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