Resonant MEMS devices combine multiple advantages: Ultra compact designs can be realized, MEMS motions allow an operation using a single detector to meet cost issues even with extended InGaAs technology and the position feedback ensures a precise and long term stable wavelength scale. Based on such resonantly actuated MEMS components NIR spectrometers have been designed. Recent research work aims for extreme miniaturization of the optical bench. The presented assembly technology has been optimized for volume production. The outline from the previous published work will be shrunk to 10 x 10 x 5 mm3 with only a slightly reduced resolution. The new design will be optimized for cost efficient production as well.
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