Portable LWIR hyperspectral imager based on MEMS Fabry-Perot interferometer and broadband microbolometric detector array

David Béland; Hélène Spisser; Denis Dufour; Loïc Le Noc; Francis Picard; Patrice Topart

doi:10.1117/12.2291751

22 February 2018 Portable LWIR hyperspectral imager based on MEMS Fabry-Perot interferometer and broadband microbolometric detector array

David Béland, Hélène Spisser, Denis Dufour, Loïc Le Noc, Francis Picard, Patrice Topart

Author Affiliations +

Proceedings Volume 10545, MOEMS and Miniaturized Systems XVII; 105450S (2018) https://doi.org/10.1117/12.2291751
Event: SPIE OPTO, 2018, San Francisco, California, United States

Abstract

The fast growing consumer electronics market of connected and wearable devices is driving a wealth of new applications. Personal capability for detecting and monitoring substances part of our everyday life (food, cosmetics, drugs, etc.) by spectroscopic means will soon become a reality as a number of new miniature spectrometers are being reported. These devices mostly operate in the visible and near infrared spectral region due to the readily available lowcost detectors in these spectral regions. However, enhanced selectivity is achievable in the molecular fingerprint spectral region (7-20 μm), allowing for applications that would be difficult or impossible at lower spectral wavelengths. To this end, a compact, portable, Long-Wave Infrared (LWIR) hyperspectral imager was developed. It is based on INO’s MICROXCAM-384 camera featuring a 384 x 288 pixel, 35 μm pitch uncooled bolometric broadband Focal Plane Array (FPA) and Fraunhofer ENAS’ 2 mm x 2 mm aperture MEMS tunable Fabry-Pérot Interferometer (FPI). The INO’s broadband FPA exhibits a Noise Equivalent Temperature Difference (NETD) lower than 25 mK (for the 8-12 μm range at 300 K, 50 fps and f/1) and a flat spectral response from 3 to 14 μm. The footprint of the hyperspectral imager is 7 cm x 8 cm x 10 cm excluding the source. The spectral resolution varies from 55 to 220 nm depending on the type of FPI used. The Noise Equivalent Spectral Radiance (NESR) is 430 mW/(m² .sr.μm) at 9 μm. Using this hyperspectral imager, spectra of various substances including polymers were recorded in the transmission, reflection and transflectance configurations. A good agreement was found with spectra obtained by applying the FPI transfer function to spectra recorded with a commercial FTIR spectrometer. The LWIR configuration of the imaging spectrometer will be described and test results presented.

Conference Presentation

Citation Download Citation

David Béland, Hélène Spisser, Denis Dufour, Loïc Le Noc, Francis Picard, and Patrice Topart "Portable LWIR hyperspectral imager based on MEMS Fabry-Perot interferometer and broadband microbolometric detector array", Proc. SPIE 10545, MOEMS and Miniaturized Systems XVII, 105450S (22 February 2018); https://doi.org/10.1117/12.2291751

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