Paper
19 February 2018 10th order laterally coupled GaN-based DFB laser diodes with V-shaped surface gratings
J. H. Kang, H. Wenzel, V. Hoffmann, E. Freier, L. Sulmoni, R.-S. Unger, S. Einfeldt, T. Wernicke, M. Kneissl
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Abstract
Single longitudinal mode operation of laterally coupled distributed feedback (DFB) laser diodes (LDs) based on GaN containing 10th-order surface Bragg gratings with V-shaped grooves is demonstrated using i-line stepper lithography and inductively coupled plasma etching. A threshold current of 82 mA, a slope efficiency of 1.7 W/A, a single peak emission at 404.5 nm with a full width at half maximum of 0.04 nm and a side mode suppression ratio of > 23 dB at an output power of about 46 mW were achieved under pulsed operation. The shift of the lasing wavelength of DFB LDs with temperature was around three times smaller than that of conventional ridge waveguide LDs.
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. H. Kang, H. Wenzel, V. Hoffmann, E. Freier, L. Sulmoni, R.-S. Unger, S. Einfeldt, T. Wernicke, and M. Kneissl "10th order laterally coupled GaN-based DFB laser diodes with V-shaped surface gratings", Proc. SPIE 10553, Novel In-Plane Semiconductor Lasers XVII, 105530A (19 February 2018); https://doi.org/10.1117/12.2289929
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Cited by 2 scholarly publications.
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KEYWORDS
Etching

Gallium

Lithography

Plasma etching

Reflectivity

Semiconductor lasers

Distributed feedback laser diodes

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