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19 March 2018 Gas permeable template derived from cellulose in ultraviolet nanoimprint
Shinya Nakajima, Kento Mizui, Makoto Hanabata, Satoshi Takei
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Proceedings Volume 10584, Novel Patterning Technologies 2018; 1058416 (2018) https://doi.org/10.1117/12.2297093
Event: SPIE Advanced Lithography, 2018, San Jose, California, United States
Abstract
Nanoimprint lithography is applied to manufacturing of cell culture dish and biosensor. The outgas released from the material often causes defects on patterns. Gas permeable templates were derived from cellulose for ultraviolet nanoimprint lithography process. The templates were made of thermoset cellulose of acrylic group and methacrylic group. The light transmission rate of the thermoset cellulose film and mechanical properties and pattern structure of the gas permeable template were measured. The template with acrylic group baked at 80 °C for 10 min. showed superior mechanical properties. This suggests the template had a large number of crosslinked points. After pattern transfer from quartz template, structures of the holes, the pillars, and the lines and spaces on the gas permeable template were observed.
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Shinya Nakajima, Kento Mizui, Makoto Hanabata, and Satoshi Takei "Gas permeable template derived from cellulose in ultraviolet nanoimprint", Proc. SPIE 10584, Novel Patterning Technologies 2018, 1058416 (19 March 2018); https://doi.org/10.1117/12.2297093
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KEYWORDS
Ultraviolet radiation
Nanoimprint lithography
Transmittance
Manufacturing
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