Author Affiliations +
Shimon Levi,1 Ishai Swrtsband,2 Vladislav Kaplan,2 Ilan Englard,3 Kurt Ronse,4 Bogumila Kutrzeba-Kotowska,4 Gaoliang Dai,5 Frank Scholze,5 Kenslea Anne,6 Hayley Johanesen,6 Laurens Kwakman,6 Igor Turovets,7 Maxim Rabinovitch,8 Sven Krannich,9 Nikolai Kasper,9 Brid Connolly,10 Romy Wende,10 Markus Bender11
1Applied Materials, Ltd. (Israel)
2Applied Materials, Inc. (Israel)
3Applied Materials Ltd. Israel (Israel)
4IMEC (Belgium)
5Physikalisch-Technische Bundesanstalt (Germany)
6FEI Co. (Netherlands)
7Nova Measuring Instruments Ltd. (Israel)
8NOVA (Israel)
9Bruker JV (Israel)
10Toppan Photomasks, Inc. (Germany)
11Advanced Mask Technology Ctr. GmbH Co. KG (Germany)