Author Affiliations +
Kaustuve Bhattacharyya,1 Marc Noot,1 Hammer Chang,2 Sax Liao,1 Ken Chang,1 Benny Gosali,2 Eason Su,1 Cathy Wang,2 Arie den Boef,1 Christophe Fouquet,1 Guo-Tsai Huang,3 Kai-Hsiung Chen,3 Kevin Cheng,3 John Lin3
1ASML Netherlands B.V. (Netherlands)
2ASML Taiwan Ltd. (Taiwan)
3Taiwan Semiconductor Manufacturing Co. Ltd. (Taiwan)