An automatic chip structure optical inspection system for electronic components

Zhichao Song; Bindang Xue; Jiyuan Liang; Ke Wang; Junzhang Chen; Yunhe Liu

doi:10.1117/12.2295496

10 January 2018 An automatic chip structure optical inspection system for electronic components

Zhichao Song, Bindang Xue, Jiyuan Liang, Ke Wang, Junzhang Chen, Yunhe Liu

Proceedings Volume 10616, 2017 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments; 106161E (2018) https://doi.org/10.1117/12.2295496
Event: International Conference on Optical Instruments and Technology 2017, 2017, Beijing, China

Abstract

An automatic chip structure inspection system based on machine vision is presented to ensure the reliability of electronic components. It consists of four major modules, including a metallographic microscope, a Gigabit Ethernet high-resolution camera, a control system and a high performance computer. An auto-focusing technique is presented to solve the problem that the chip surface is not on the same focusing surface under the high magnification of the microscope. A panoramic high-resolution image stitching algorithm is adopted to deal with the contradiction between resolution and field of view, caused by different sizes of electronic components. In addition, we establish a database to storage and callback appropriate parameters to ensure the consistency of chip images of electronic components with the same model. We use image change detection technology to realize the detection of chip images of electronic components. The system can achieve high-resolution imaging for chips of electronic components with various sizes, and clearly imaging for the surface of chip with different horizontal and standardized imaging for ones with the same model, and can recognize chip defects.

Citation Download Citation

Zhichao Song, Bindang Xue, Jiyuan Liang, Ke Wang, Junzhang Chen, and Yunhe Liu "An automatic chip structure optical inspection system for electronic components", Proc. SPIE 10616, 2017 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments, 106161E (10 January 2018); https://doi.org/10.1117/12.2295496

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KEYWORDS

Electronic components

Inspection

Microscopes

Control systems

Imaging systems

Machine vision

Image resolution

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