A method for improving the measurement accuracy of lateral shearing interferometry

Jie Li; Feng Tang; Xiangzhao Wang; Rongsheng Ba; Xinda Zhou; Yinbo Zheng; Lei Ding; Bo Chen; Xiaoyu Yang; Jing Yuan

doi:10.1117/12.2286323

10 January 2018 A method for improving the measurement accuracy of lateral shearing interferometry

Jie Li, Feng Tang, Xiangzhao Wang, Rongsheng Ba, Xinda Zhou, Yinbo Zheng, Lei Ding, Bo Chen, Xiaoyu Yang, Jing Yuan

Proceedings Volume 10618, 2017 International Conference on Optical Instruments and Technology: Advanced Optical Sensors and Applications; 106180P (2018) https://doi.org/10.1117/12.2286323
Event: International Conference on Optical Instruments and Technology 2017, 2017, Beijing, China

Abstract

A systematic error calibration method is presented to improve the measurement accuracy of lateral shearing interferometry (LSI). This method is used to remove the most significant errors: geometric optical path difference (OPD) and detector tilt error. Difference fronts in the 0° and 90° directions are used to reconstruct wavefront using difference Zernike polynomial fitting. And difference fronts in the 45° and 135° directions are also used to reconstruct wavefront. The coefficient differences between the reconstructed wavefront are generated from geometric OPD and detector tilt error. The relationship between Zernike coefficient differences and systematic parameters are presented based on shear matrix. Thus, the distance of diffracted light converging point (d) and detector tilt angle can be calculated from the coefficient difference. Based on the calculated d and detector tilt angle, the geometric OPD and detector-tilt induced systematic errors are removed and the measurement accuracy of LSI is improved.

Citation Download Citation

Jie Li, Feng Tang, Xiangzhao Wang, Rongsheng Ba, Xinda Zhou, Yinbo Zheng, Lei Ding, Bo Chen, Xiaoyu Yang, and Jing Yuan "A method for improving the measurement accuracy of lateral shearing interferometry", Proc. SPIE 10618, 2017 International Conference on Optical Instruments and Technology: Advanced Optical Sensors and Applications, 106180P (10 January 2018); https://doi.org/10.1117/12.2286323

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available