Design of polarization-independent transmission fused-silica grating with high diffraction efficiency

Yushui Cheng; Chaoming Li; Xinrong Chen; Jian Yu; Yu Tang; Rui Wang; Haiyan Xu; Zuyuan Hu; Jianhong Wu

doi:10.1117/12.2295251

12 January 2018 Design of polarization-independent transmission fused-silica grating with high diffraction efficiency

Yushui Cheng, Chaoming Li, Xinrong Chen, Jian Yu, Yu Tang, Rui Wang, Haiyan Xu, Zuyuan Hu, Jianhong Wu

Proceedings Volume 10622, 2017 International Conference on Optical Instruments and Technology: Micro/Nano Photonics: Materials and Devices; 106220J (2018) https://doi.org/10.1117/12.2295251
Event: International Conference on Optical Instruments and Technology 2017, 2017, Beijing, China

Abstract

The high diffraction efficiency and high dispersion ability of diffraction grating plays a very important role in laser systems. Fused-silica transmission gratings not only have board band, high diffraction efficiency and high damage threshold, but also have the advantage of light path without shelter comparing to reflective gratings. In this paper, the study of polarization-independent transmission fused-silica grating is carried out, and the influence of rectangular and trapezoidal grating microstructures on the -1st diffraction efficiency of grating is analyzed. For trapezoidal groove structure, in the range of 80 to 90 degrees, the distributions of diffraction efficiency at different bottom angle are calculated and analyzed. The structure parameters of the grating are optimized by rigorous coupled wave theory. The designed grating groove density is 1440 lines/mm. The -1st diffraction efficiency of the grating is over 96% for both of TE and TM polarized waves at the Littrow angle (49.7 degrees) with the center wavelength of 1060nm. Within the bandwidth of 42nm (from 1039 to 1081nm), the -1st diffraction efficiency of the designed grating is theoretically greater than 90% for both of TE and TM polarized waves.

Citation Download Citation

Yushui Cheng, Chaoming Li, Xinrong Chen, Jian Yu, Yu Tang, Rui Wang, Haiyan Xu, Zuyuan Hu, and Jianhong Wu "Design of polarization-independent transmission fused-silica grating with high diffraction efficiency", Proc. SPIE 10622, 2017 International Conference on Optical Instruments and Technology: Micro/Nano Photonics: Materials and Devices, 106220J (12 January 2018); https://doi.org/10.1117/12.2295251

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KEYWORDS

Diffraction gratings

Diffraction

Optical design

Etching

Analytical research

Reactive ion etching

Laser damage threshold

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