High-performance uncooled digital 17 μm QVGA-IRFPA-using microbolometer based on amorphous silicon with massively parallel Sigma-Delta-ADC readout

Dirk Weiler; Frank Hochschulz; Claudia Busch; Matthias Stein; Marvin D. Michel; Daniel Würfel; Renee Lerch; Martin Petermann; Thomas Geruschke; Sebastian Blaeser; Sascha Weyers; Holger Vogt

doi:10.1117/12.2304866

29 May 2018 High-performance uncooled digital 17 μm QVGA-IRFPA-using microbolometer based on amorphous silicon with massively parallel Sigma-Delta-ADC readout

Dirk Weiler, Frank Hochschulz, Claudia Busch, Matthias Stein, Marvin D. Michel, Daniel Würfel, Renee Lerch, Martin Petermann, Thomas Geruschke, Sebastian Blaeser, Sascha Weyers, Holger Vogt

Author Affiliations +

Proceedings Volume 10624, Infrared Technology and Applications XLIV; 1062419 (2018) https://doi.org/10.1117/12.2304866
Event: SPIE Defense + Security, 2018, Orlando, FL, United States

Abstract

This paper presents the results of a high-performance digital QVGA-IRFPA based on uncooled microbolometers with a pixel-pitch of 17 μm and a chip-scale-package as the vacuum package developed and fabricated by Fraunhofer-IMS. Due to a direct conversion of the microbolometer’s resistance into a 16 bit value by the use of massively parallel on-chip Sigma-Delta-ADCs a high scene temperature dynamic range of more than 300 K and a very low NETD-value below 50 mK is achieved. Due to a broad-band antireflection coating the digital 17 μm QVGA-IRFPA achieves a high sensitivity in the LWIR (wavelength 8 μm to 14 μm) and MWIR (wavelength 3 μm to 5 μm) range. In this paper the microbolometer, the vacuum-packaging, the architecture of the readout electronics, and the electro-optical performance characterization will be presented.

Conference Presentation

Citation Download Citation

Dirk Weiler, Frank Hochschulz, Claudia Busch, Matthias Stein, Marvin D. Michel, Daniel Würfel, Renee Lerch, Martin Petermann, Thomas Geruschke, Sebastian Blaeser, Sascha Weyers, and Holger Vogt "High-performance uncooled digital 17 μm QVGA-IRFPA-using microbolometer based on amorphous silicon with massively parallel Sigma-Delta-ADC readout", Proc. SPIE 10624, Infrared Technology and Applications XLIV, 1062419 (29 May 2018); https://doi.org/10.1117/12.2304866

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