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15 May 2018 3D topography of reflective samples by single-shot digital holographic microscopy (Conference Presentation)
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Abstract
In this contribution, the 3D-topography of a reflective sample is obtained by single-shot digital holographic microscopy. An off-axis digital holographic microscope operating in reflection mode and telecentric regimen is utilized to reproduce the 3D-topography of fully reflective microscopic sample. The main characteristics of the proposed method that make it different from other strategies for performing the same task are: i) the possibility of producing the 3D-topography by a single-shot, ii) the use of the complete field of view of the microscope, iii) to operate with sensitivity of λ/100, iv) to work without phase perturbations introduced by the illuminating-imaging system, and v) the no need of further numerical processing beyond the regularly required to recover the phase map of the sample. A complete analysis of the illuminating-imaging system through the use of the ABCD diffraction theory of the digital holographic microscope is presented. 3D-topographies of an USAF resolution
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Jorge Garcia-Sucerquia and Raul Castañeda "3D topography of reflective samples by single-shot digital holographic microscopy (Conference Presentation)", Proc. SPIE 10666, Three-Dimensional Imaging, Visualization, and Display 2018, 106660V (15 May 2018); https://doi.org/10.1117/12.2306863
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