Paper
20 February 2018 Study on the convex dual-blazed grating
Quan Liu, Jianhong Wu, Peiliang Guo, Feng Zhou
Author Affiliations +
Proceedings Volume 10697, Fourth Seminar on Novel Optoelectronic Detection Technology and Application; 106972G (2018) https://doi.org/10.1117/12.2315485
Event: Fourth Seminar on Novel Optoelectronic Detection Technology and Application, 2017, Nanjing, China
Abstract
The high diffraction efficiency of the convex blazed gratings cannot be realized in the broadband. Therefore, we have designed the convex dual-blazed grating to realize higher and uniform diffraction efficiency in the wavelength from 0.4 μm to 2.5 μm. The diffraction efficiency of the convex dual-blazed grating is investigated by using rigorous coupled wave analysis. The results show: when the two blaze angles of the convex dual-blazed grating, one within the range from 2.7 degree to 3.4 degree and the other one within the range from 8 degree to 9 degree respectively, the first-order diffraction efficiency is more than 25 percent at the visible-near infrared band. The convex dual-blazed grating with the period of 5μm in the center will be fabricated by holographic lithography-segmented ion beam etching in late 2017.
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Quan Liu, Jianhong Wu, Peiliang Guo, and Feng Zhou "Study on the convex dual-blazed grating", Proc. SPIE 10697, Fourth Seminar on Novel Optoelectronic Detection Technology and Application, 106972G (20 February 2018); https://doi.org/10.1117/12.2315485
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KEYWORDS
Diffraction

Diffraction gratings

Etching

Holography

Ion beams

Lithography

Spectrometers

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