Next generation adaptive optics: a low-voltage ASIC driver for MEMS deformable mirrors

Colin Ross; Scott Chapman; Kamal El-Sankary; Cyrus Shafai; Greg Burley; Yu Zhou; Byoungyoul Park

doi:10.1117/12.2314256

11 July 2018 Next generation adaptive optics: a low-voltage ASIC driver for MEMS deformable mirrors

Colin Ross, Scott Chapman, Kamal El-Sankary, Cyrus Shafai, Greg Burley, Yu Zhou, Byoungyoul Park

Proceedings Volume 10703, Adaptive Optics Systems VI; 107034G (2018) https://doi.org/10.1117/12.2314256
Event: SPIE Astronomical Telescopes + Instrumentation, 2018, Austin, Texas, United States

Abstract

We report on an application specific integrated circuit (ASIC) drive electronics system being developed for integration with low-voltage (~20 V) microelectromechanical (MEMS) deformable mirror technology for next- generation adaptive optics instruments. The ASIC is designed and manufactured using a CMOS foundry to address the power consumption and signal routing complexity issues inherent to conventional drive electronics. A prototype 9-channel driver capable of producing a bipolar (±15 V) output signal has been designed and sent for fabrication. Simulation results and preliminary integration avenues for a fully packaged ASIC/MEMS device that exploit increasingly popular trends in the semiconductor industry will also be presented.

Citation Download Citation

Colin Ross, Scott Chapman, Kamal El-Sankary, Cyrus Shafai, Greg Burley, Yu Zhou, and Byoungyoul Park "Next generation adaptive optics: a low-voltage ASIC driver for MEMS deformable mirrors ", Proc. SPIE 10703, Adaptive Optics Systems VI, 107034G (11 July 2018); https://doi.org/10.1117/12.2314256

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