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19 September 2018 Size reduction of high-channel Si3N4 based AWG-spectrometer for medical applications
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In this paper we present the size reduction of a 160-channel, 50-GHz Si3N4 based AWG-spectrometer. The spectrometer was designed for TM-polarized light with a central wavelength of 850 nm applying our proprietary “AWG-Parameters” tool. For the simulations of AWG layout, the PHASAR photonics tool from Optiwave was used. The simulated results show satisfying optical properties of the designed AWG-spectrometer. However, such high-channel count AWG features large size. To solve this problem we designed a special taper enabling the reduction of AWG structure by about 15%, while keeping the same optical properties. The technological verification of both AWG designs is also presented.
Conference Presentation
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
D. Seyringer, C. Burtscher, J. Edlinger, W. Drexler, E. Rank, P. Muellner, R. Hainberger, A. Maese-Novo, M. Vlaskovic, H. Zimmermann, J. Kraft, G. Koppitsch, M. Sagmeister, and G. Meinhardt "Size reduction of high-channel Si3N4 based AWG-spectrometer for medical applications", Proc. SPIE 10730, Nanoengineering: Fabrication, Properties, Optics, and Devices XV, 107300R (19 September 2018);


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