Three-dimensional shape measurement beyond the diffraction limit of lens using speckle interferometry

Y. Arai

doi:10.1117/12.2318040

18 August 2018 Three-dimensional shape measurement beyond the diffraction limit of lens using speckle interferometry

Y. Arai

Proceedings Volume 10749, Interferometry XIX; 1074902 (2018) https://doi.org/10.1117/12.2318040
Event: SPIE Optical Engineering + Applications, 2018, San Diego, California, United States

Abstract

Speckle interferometry is generally known as a method that measures the deformation on an object with rough surfaces. In this paper, a three-dimensional (3-D) shape-measurement method is proposed for superfine structures beyond the diffraction limit using the basic feature of speckle interferometry. Because the differential coefficient distribution of the shape of such an object can be detected by giving a known lateral shift to the measured object in speckle interferometry, the shape can be reconstructed by integrating the differential coefficient distribution. Based on experimental results obtained using diffraction gratings as measured objects, it is confirmed that the proposed method can measure 3-D shapes that are beyond the diffraction limit of the lens.

Conference Presentation

Citation Download Citation

Y. Arai "Three-dimensional shape measurement beyond the diffraction limit of lens using speckle interferometry", Proc. SPIE 10749, Interferometry XIX, 1074902 (18 August 2018); https://doi.org/10.1117/12.2318040

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