Synchronized real-space and frequency-domain low-coherence interferometry for wafer thickness and metrology applications

Raphael Morency; Wei Chun Hung; Wojtek J. Walecki

doi:10.1117/12.2317579

18 August 2018 Synchronized real-space and frequency-domain low-coherence interferometry for wafer thickness and metrology applications

Raphael Morency, Wei Chun Hung, Wojtek J. Walecki

Author Affiliations +

Proceedings Volume 10749, Interferometry XIX; 107490Z (2018) https://doi.org/10.1117/12.2317579
Event: SPIE Optical Engineering + Applications, 2018, San Diego, California, United States

Abstract

We discuss the application of new synchronized, and virtually synchronized multiprobe real space and frequency domain low coherence interferometers for measurement of wafer thickness and topography. The recently developed low coherence frequency domain interferometers have been proved to be fast and effective tool for measurement of wafer topography, thickness and individual layers within multilayer structures. In our paper we present simple models describing performance of multiprobe metrology and compare it with other solutions.

Conference Presentation

Citation Download Citation

Raphael Morency, Wei Chun Hung, and Wojtek J. Walecki "Synchronized real-space and frequency-domain low-coherence interferometry for wafer thickness and metrology applications", Proc. SPIE 10749, Interferometry XIX, 107490Z (18 August 2018); https://doi.org/10.1117/12.2317579

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available