A high dynamic range imaging method for the characterization of periodic errors in diffraction gratings

Sofia C. Corzo-Garcia; Muhammad Imran Afzal; Benjamin T. Kidder; Michelle A. Grigas; Ulf Griesmann

doi:10.1117/12.2321227

4 September 2018 A high dynamic range imaging method for the characterization of periodic errors in diffraction gratings

Sofia C. Corzo-Garcia, Muhammad Imran Afzal, Benjamin T. Kidder, Michelle A. Grigas, Ulf Griesmann

Author Affiliations +

Proceedings Volume 10750, Reflection, Scattering, and Diffraction from Surfaces VI; 1075009 (2018) https://doi.org/10.1117/12.2321227
Event: SPIE Optical Engineering + Applications, 2018, San Diego, California, United States

Abstract

We report on recent progress in the development of our focal plane imaging system for the detection and characterization of small fabrication errors in diffraction gratings. The instrument uses a purpose-designed high dynamic range imaging method in conjunction with a low-cost digital camera to acquire images with a dynamic range that can now exceed eight orders of magnitude. The sensitivity and utility of the instrument is demonstrated with measurements of three different diffraction gratings. Avenues for further possible improvements of the instrument are discussed.

Conference Presentation

Citation Download Citation

Sofia C. Corzo-Garcia, Muhammad Imran Afzal, Benjamin T. Kidder, Michelle A. Grigas, and Ulf Griesmann "A high dynamic range imaging method for the characterization of periodic errors in diffraction gratings", Proc. SPIE 10750, Reflection, Scattering, and Diffraction from Surfaces VI, 1075009 (4 September 2018); https://doi.org/10.1117/12.2321227

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