Plasmonic resonances in metal covered 2D hexagonal gratings fabricated by interference lithography

Andrei A. Ushkov; Maxime Bichotte; Isabelle Verrier; Thomas Kampfe; Yves Jourlin

doi:10.1117/12.2323763

19 September 2018 Plasmonic resonances in metal covered 2D hexagonal gratings fabricated by interference lithography

Andrei A. Ushkov, Maxime Bichotte, Isabelle Verrier, Thomas Kampfe, Yves Jourlin

Proceedings Volume 10775, 34th European Mask and Lithography Conference; 1077516 (2018) https://doi.org/10.1117/12.2323763
Event: 34th European Mask and Lithography Conference, 2018, Grenoble, France

Abstract

We present both modeling and experimental results devoted to design, fabrication and characterization of metal covered hexagonal diffraction gratings. Variation of exposition and development time allow to modify the shape of the elementary cell, leaving the depth and periodicity unchanged. The fabrication process was modeled using real parameters of the lithography bench and the photoresist, substantially improving experimental results. The high quality of metal covered gratings is confirmed by excitation of plasmonic resonances, which are in a good agreement with theoretical predictions. The described approach allows to better understand plasmonic effects in 2D periodic structures and leads to an optimized design of plasmonic sensors.

Citation Download Citation

Andrei A. Ushkov, Maxime Bichotte, Isabelle Verrier, Thomas Kampfe, and Yves Jourlin "Plasmonic resonances in metal covered 2D hexagonal gratings fabricated by interference lithography", Proc. SPIE 10775, 34th European Mask and Lithography Conference, 1077516 (19 September 2018); https://doi.org/10.1117/12.2323763

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available