Optical design of high-aperture lens objectives for NUV and DUV spectral ranges

Dmitry N. Frolov; Olga A. Vinogradova; Georgi Burdzhanadze; Liyun Wen

doi:10.1117/12.2504676

5 November 2018 Optical design of high-aperture lens objectives for NUV and DUV spectral ranges

Dmitry N. Frolov, Olga A. Vinogradova, Georgi Burdzhanadze, Liyun Wen

Proceedings Volume 10816, Advanced Optical Imaging Technologies; 108161V (2018) https://doi.org/10.1117/12.2504676
Event: SPIE/COS Photonics Asia, 2018, Beijing, China

Abstract

The aspects of the use of dioptric optics for DUV microscopy are considered. The transition to the NUV and DUV range can significantly improve the resolving power of the microscope. Different kinds of crystals can be used as optical materials.

Citation Download Citation

Dmitry N. Frolov, Olga A. Vinogradova, Georgi Burdzhanadze, and Liyun Wen "Optical design of high-aperture lens objectives for NUV and DUV spectral ranges", Proc. SPIE 10816, Advanced Optical Imaging Technologies, 108161V (5 November 2018); https://doi.org/10.1117/12.2504676

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