Measurement of micro-angle based on the Talbot effect of 2D grating

Xing Xu; Gaokun Huang; Sumei Zhou

doi:10.1117/12.2501066

2 November 2018 Measurement of micro-angle based on the Talbot effect of 2D grating

Xing Xu, Gaokun Huang, Sumei Zhou

Proceedings Volume 10818, Holography, Diffractive Optics, and Applications VIII; 1081813 (2018) https://doi.org/10.1117/12.2501066
Event: SPIE/COS Photonics Asia, 2018, Beijing, China

Abstract

In this paper, we propose a method for measuring the micro-angle based on the 2D grating Talbot effect to generate the moiré fringe period. Firstly, the measurement principle of the micro rotation angle of the 2D grating and the characteristics of the 2D grating Talbot imaging are analyzed. And then the 2D grating is measured by the Moiré fringe generated by the Talbot image. Based on this, we derive the calculation formula of the angle, and analyze the accuracy of this method of measuring angle. The method of generating moiré fringes by Talbot imaging has the advantages of higher precision, more flexibility and convenience in measuring the rotation angle than stacking two directly.

Citation Download Citation

Xing Xu, Gaokun Huang, and Sumei Zhou "Measurement of micro-angle based on the Talbot effect of 2D grating ", Proc. SPIE 10818, Holography, Diffractive Optics, and Applications VIII, 1081813 (2 November 2018); https://doi.org/10.1117/12.2501066

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