Direct phase determination using simple phase lock loop for heterodyne displacement-measuring interferometers

Thanh-Dong Nguyen Sr.; Quang-Anh Duong Sr.; Masato Higuchi; Wei Dong; Masato Aketagawa

doi:10.1117/12.2500626

6 November 2018 Direct phase determination using simple phase lock loop for heterodyne displacement-measuring interferometers

Thanh-Dong Nguyen Sr., Quang-Anh Duong Sr., Masato Higuchi, Wei Dong, Masato Aketagawa

Author Affiliations +

Proceedings Volume 10819, Optical Metrology and Inspection for Industrial Applications V; 1081907 (2018) https://doi.org/10.1117/12.2500626
Event: SPIE/COS Photonics Asia, 2018, Beijing, China

Abstract

In this paper, direct phase determination method which is based on the phase-locked loop technique and the null method is proposed for heterodyne-displacement-measuring interferometers. The requirement of the proposed method is to detect high-speed phase changes in the phase shift between two sinusoidal input signals, leading to measuring high-speed displacements in industrial applications. The method is estimated for two situations that include the use of (a) two pure sinusoidal signals from a function generator and (b) two interferometric signals from a heterodyne interferometer, which is integrated to an electro-optic modulator for phase modulation. The experimental results of the method provide the phase-variation-measuring speed with a modulation frequency of 20kHz in the 2.7MHz-input sinusoid. The principle, signal-processing program, experiments and results of the method are presented in the paper.

Citation Download Citation

Thanh-Dong Nguyen Sr., Quang-Anh Duong Sr., Masato Higuchi, Wei Dong, and Masato Aketagawa "Direct phase determination using simple phase lock loop for heterodyne displacement-measuring interferometers", Proc. SPIE 10819, Optical Metrology and Inspection for Industrial Applications V, 1081907 (6 November 2018); https://doi.org/10.1117/12.2500626

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