Robustness evaluation of the non-contact inner diameter measuring device with micrometer order accuracy

Toshiyasu Mitsunari; Yuji Okamoto; Itta Nozawa; Kazunori Yamazaki

doi:10.1117/12.2501020

6 November 2018 Robustness evaluation of the non-contact inner diameter measuring device with micrometer order accuracy

Toshiyasu Mitsunari, Yuji Okamoto, Itta Nozawa, Kazunori Yamazaki

Proceedings Volume 10819, Optical Metrology and Inspection for Industrial Applications V; 1081908 (2018) https://doi.org/10.1117/12.2501020
Event: SPIE/COS Photonics Asia, 2018, Beijing, China

Abstract

In recent years, high-speed inspection using non-contact measurement has been increasingly desired in the field of manufacturing. Inner diameter measurement of a cylindrical part is also the same. One of the promising methods for the non-contact inner diameter measurement is the light sectioning method using a ring beam device which consists of a conical mirror and a laser diode. However, further investigation is needed when it comes to practical use at the manufacturing site, especially for the requirement of measuring accuracy of micron order. We have been developing an inner diameter measuring device using the ring beam sectioning method with accuracy on the order of micrometers, aiming at the practical use at the production site. One of the features of our system is the robustness against the relative positional deviation between the workpiece and the sensor probe. Robustness is very important for the use at the production site. In this paper, we report on its evaluation results. We designed and manufactured the ring beam device so that the ring beam is uniform and exits horizontally from the conical mirror for the sake of achieving high accuracy and robustness. We created a simulation model for robustness evaluation by using the measured characteristics of the ring beam. Against the misalignment of central axis between the workpiece and the sensor probe, measurement dependency of less than 0.2 um/mm was obtained. And less than 0.1 um/min was obtained against the angular misalignment. We are also conducting experimental verification, and discuss the difference between the simulation and the experiment.

Citation Download Citation

Toshiyasu Mitsunari, Yuji Okamoto, Itta Nozawa, and Kazunori Yamazaki "Robustness evaluation of the non-contact inner diameter measuring device with micrometer order accuracy", Proc. SPIE 10819, Optical Metrology and Inspection for Industrial Applications V, 1081908 (6 November 2018); https://doi.org/10.1117/12.2501020

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
8 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Cameras

Distortion

Inspection

Manufacturing

Measurement devices

Optical fibers

Optical simulations

Show All Keywords

Keywords/Phrases

Search In:

Publication Years