Systematic error correction of a gap measuring system using a multi-layer artifact

Sen Zhou; Jian Xu; Long Wang; Lei Tao; Yueqing Ding

doi:10.1117/12.2501052

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23 October 2018 Systematic error correction of a gap measuring system using a multi-layer artifact

Sen Zhou, Jian Xu, Long Wang, Lei Tao, Yueqing Ding

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Proceedings Volume 10821, Advanced Sensor Systems and Applications VIII; 108211N (2018) https://doi.org/10.1117/12.2501052
Event: SPIE/COS Photonics Asia, 2018, Beijing, China

Abstract

This article presents a novel multi-layer artifact for systematic error correction of a gap measuring system, consisting a 3D laser scanner and motorized linear stages. This artifact representation of five-layers gap shape with continuous free-form surface was designed, which include diverse form dimensions. Then, in order to improve the measurement accuracy of the range dimension of the gaps, a one-step calibration procedure based on an experimental process has been developed. The influence of the three parameters on width error, depth error and flush error, defining the relative position and the orientation between the scanner and the range gaps, is respectively considered. The results obtained in accuracy and repeatability tests performed on this multi-layer artifact primitives attest to the viability of this correction method for gap measuring system.

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Sen Zhou, Jian Xu, Long Wang, Lei Tao, and Yueqing Ding "Systematic error correction of a gap measuring system using a multi-layer artifact", Proc. SPIE 10821, Advanced Sensor Systems and Applications VIII, 108211N (23 October 2018); https://doi.org/10.1117/12.2501052

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