High-resolution laser fabrication of amplitude diffractive structures on thin metal films

Victor P. Korolkov; Sergey L. Mikerin; Konstantin A. Okotrub; Alexander R. Sametov; Anatoly I. Malyshev

doi:10.1117/12.2501246

25 October 2018 High-resolution laser fabrication of amplitude diffractive structures on thin metal films

Victor P. Korolkov, Sergey L. Mikerin, Konstantin A. Okotrub, Alexander R. Sametov, Anatoly I. Malyshev

Proceedings Volume 10823, Nanophotonics and Micro/Nano Optics IV; 108230X (2018) https://doi.org/10.1117/12.2501246
Event: SPIE/COS Photonics Asia, 2018, Beijing, China

Abstract

Thermochemical direct laser writing of amplitude diffractive structures on thin metal films (Zr, Ta, V, Mo, Cr) at different processing conditions with focused cw laser beam has been experimentally investigated. The study was aimed to select proper material and thickness range ensuring through oxidation, which helps to get higher resolution due to bleaching of the thin absorbing film near peak of intensity distribution of focused laser beam and stopping thermal trace widening. The resistless thermal writing process will be further used as base for developing high-resolution laser lithography system with 266 nm DPSS laser intended for nano-optics fabrication.

Citation Download Citation

Victor P. Korolkov, Sergey L. Mikerin, Konstantin A. Okotrub, Alexander R. Sametov, and Anatoly I. Malyshev "High-resolution laser fabrication of amplitude diffractive structures on thin metal films", Proc. SPIE 10823, Nanophotonics and Micro/Nano Optics IV, 108230X (25 October 2018); https://doi.org/10.1117/12.2501246

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