Precision patterning sub-nanometrology relied up pico-meter quantum sensing approach

Yan Fang M.D.

doi:10.1117/12.2502685

9 November 2018 Precision patterning sub-nanometrology relied up pico-meter quantum sensing approach

Yan Fang M.D.

Proceedings Volume 10825, Quantum and Nonlinear Optics V; 108250B (2018) https://doi.org/10.1117/12.2502685
Event: SPIE/COS Photonics Asia, 2018, Beijing, China

Abstract

A precision patterning sub-nanometrology in a single quantum state such as a single electron, a single photon, a single atom, a single molecule, etc. leads an international technology roadmap for semiconductors (ITRS) to quantum noise limits, where quantum effects occur in a sub-nanometer (sub-nm) real space with ultra-fast time and frequency resolutions. Classical metrology technologies face challenges, due to failure to achieve such a transient resolution. In response to the cutting-edge issue, a precision patterning sub-nanometrology relied up a pico-meter quantum sensing approach was developed to satisfy a precision sub-nanometrology need, wherein a conducting atomic force microscopy (C-AFM) coupling a laser micro-photoluminescence (micro-PL) spectroscopy was a state-of-the art height-current-phase uncertainty correlation reproducible traceable precision sub-nanometrology technology with a powerful pico-meter (pm) spatial resolution associated with transient quantized pico-ample differential current-nominal voltage resolutions relied up a quantum electrical measurement triangle principle. A self-assembled vertical nanomedicine photoluminescence crystal array with an atomic interference effect was revealed in Figure 1 and a quantum regenerative amplification principle was discussed. It is concluded that a precision patterning sub-nanometrology relied up a pico-meter quantum sensing approach provides a new impetus for an integrated circuit scaling and paves a way towards developing quantumlevel self-alignment patterning technologies to support precision quantum sensing and metrological device innovations and beyond, which are important for quality-profit upgrades and global industry developments.

Citation Download Citation

Yan Fang M.D. "Precision patterning sub-nanometrology relied up pico-meter quantum sensing approach", Proc. SPIE 10825, Quantum and Nonlinear Optics V, 108250B (9 November 2018); https://doi.org/10.1117/12.2502685

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KEYWORDS

Optical lithography

Laser spectroscopy

Frequency modulation

Atomic force microscopy

Crystals

Fermium

Scanning tunneling microscopy

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