The study of nano-structure on in-situ UV laser irradiating GaAs(001) substrate

Changwei Deng; Linyun Yang; Lili Miao; Xinning Yang; Changsi Peng

doi:10.1117/12.2500785

24 July 2018 The study of nano-structure on in-situ UV laser irradiating GaAs(001) substrate

Changwei Deng, Linyun Yang, Lili Miao, Xinning Yang, Changsi Peng

Proceedings Volume 10827, Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018); 1082729 (2018) https://doi.org/10.1117/12.2500785
Event: Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018), 2018, Shanghai, China

Abstract

The AFM study of a series of novel nano-structure on in-situ laser irradiating GaAs(001) substrate in molecular beam epitaxy was presented. Nano-hole, nano-island and nano-ring(Chinese ancient copper coin shape) were observed after laser irradiating. The desorption of Gallium on GaAs surface varies according to different power energy and pulse numbers, leading to the formation of nano-holes, nano-islands and nano-rings. It is speculated that these nanostructures are galliumrich through the change of the RHEED stripe. What’s more, the desorption of defectless GaAs sub-monolayer was discovered, and matched dynamic evolution model (self-drilling effect dominated by Ga atom) was presented. The dependence of the temperature on the surface of the substrate with time was studied after laser irradiating according to the heat conduction equation. The drastic temperature changes caused non-thermodynamic equilibrium process which makes these morphologies.

Citation Download Citation

Changwei Deng, Linyun Yang, Lili Miao, Xinning Yang, and Changsi Peng "The study of nano-structure on in-situ UV laser irradiating GaAs(001) substrate", Proc. SPIE 10827, Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018), 1082729 (24 July 2018); https://doi.org/10.1117/12.2500785

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available