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7 August 2018 Closed-loop next generation laser polishing
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Proceedings Volume 10829, Fifth European Seminar on Precision Optics Manufacturing; 108290M (2018) https://doi.org/10.1117/12.2318749
Event: Fifth European Seminar on Precision Optics Manufacturing, 2018, Teisnach, Germany
Abstract
A novel fabrication parameter controlling method for laser polishing processes called CLasso (Control of LASer Surface Optimization) is presented, monitoring within the footprint the smoothening process as well as the removal of ssd in situ. Therefore, it is possible to determine and control the optimum dwell time a footprint needs to stay at a certain point before moving further enabling a more stable and cost optimized polishing.
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rolf Rascher, Christian Vogt, Oliver Fähnle, and DaeWook Kim "Closed-loop next generation laser polishing ", Proc. SPIE 10829, Fifth European Seminar on Precision Optics Manufacturing, 108290M (7 August 2018); https://doi.org/10.1117/12.2318749
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