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7 September 2018 Phase shift strategies in phase shifting time averaging interferometry for harmonic motion measurements
Adam Styk, Helena Dziubecka
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Proceedings Volume 10834, Speckle 2018: VII International Conference on Speckle Metrology; 108342C (2018) https://doi.org/10.1117/12.2319769
Event: SPECKLE 2018: VII International Conference on Speckle Metrology, 2018, Janów Podlaski, Poland
Abstract
Classical time-averaging is widely used for MEMS/MOEMS dynamic behavior investigations. In order to evaluate the information on maximum amplitude at a given load of vibrating object one needs to evaluate the argument of Bessel function that encodes the useful information. For this purpose many different approaches were presented. Among them Temporal Phase Shifting applied to Bessel fringes is of special interest since it provides most accurate results. It, however, requires additional cumbersome pixelwise correction routine via specially designed look-up-table. In this paper we investigate, through extensive numerical simulations, the possibility of reduction of phase evaluation error (without correction routine) by different strategies of phase shifting. Two different 5 step algorithms are investigated for that purpose. Additionally, quick and robust correction procedure based on evaluated phase distribution is presented.
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Adam Styk and Helena Dziubecka "Phase shift strategies in phase shifting time averaging interferometry for harmonic motion measurements", Proc. SPIE 10834, Speckle 2018: VII International Conference on Speckle Metrology, 108342C (7 September 2018); https://doi.org/10.1117/12.2319769
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KEYWORDS
Phase shifts
Phase shifting
Interferometry
Digital signal processing
Bessel functions
Fringe analysis
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